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Electron beam induced current
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41
3D simulation of morphological effect on reflectance of Si3N4 sub-wavelength structures for silicon solar cells
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Source URL: www.ncbi.nlm.nih.gov
Language: English
Scientific method
Nanoelectronics
Nanowire
Microtechnology
Silicon
Porous silicon
Electron beam induced current
Etching
Scanning electron microscope
Materials science
Science
Semiconductor device fabrication
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